Vacuum Evaporation Materials (Evaporation Soures)
Metal Evaporation Material | Alloy Evaporation Material | Oxide Evaporaion Material | Fluoride Evaporation Material |
Other Evaporation Material | Evaporation Sourse
Tungsten Filament, Tungsten Boat, Molybdenum Boat, Evaporation
Sheet, Tantalum Sheet, Tungsten Crucible, Tantalum Crucible, Ceramic
Crucible, Copper Crucible ( water cooling ) .
Evaporation Sources list as below (On Type ):
| Heat |
Evapor-ation Source |
Evapor-ation Material |
Film Area |
Max Working
Tempe-rature /K |
Deposition Speed |
Speed Control |
Adhesive
Force |
Purity of film |
Super
high vacuum evapora- tion coating |
Attached |
1.Resist- ance Heat |
Evapor-ation Coil, Filament, evapor- ation crucible, electrify |
Almost all material |
Middle |
2000 |
<10 |
Easy |
Good |
Good - Better |
can |
Coating mateiral will alloy with heat wire and break. |
2. Heat Crucible |
Ceramic crucible + heat booster |
Almost all material |
Middle |
2000 |
10-99 |
Easy |
Good |
Low - Good |
cann't |
come into beingdeoxidize deposition |
3.Radiate Heat (Are heat) |
Surface of Sample, heat Screen crucible (W,Ta) |
Almost all material |
Small |
2000-3000 |
10-99 |
Difficult |
Good |
Good - Better |
can |
can make used solar energy |
4. High frequency heat |
Ceramic Crucible |
metal |
Middle |
2000 |
10-99 |
Difficult |
Good |
Good |
cann't |
cann't interfused impurity |
5. Elec-tron Beam heat |
Water cooling copper crucible + electrion gun |
Almost all material |
Middle |
3500 |
100-999 |
Possible |
Better |
Better - Best |
can |
high Voltage (1-99 kv) |
6. Electron Bomba-rdment |
Water cooling copper crucible + Sample rod |
metal |
Middle |
2500 |
<10 |
Possible |
Better |
Best |
can |
Same as 5, compare with 5, 与5。
Not directly part of more than heat, so the deflated more voltage to several thousand volts |
7. Flash Braise |
High Tempe- rature Evapora- tion boat |
Almost all material |
Small- Middle |
-2500 |
about 100 |
Dispossible |
Better |
Good - Best |
cann't |
Suitable compounds,alloys,spray release |
8. Electrify Explode wire |
Wire of Evapor- ation materials |
metal |
Small- Middle |
-3000 |
about 100,000 |
Dispossible |
Good |
Better |
Cann't |
come into being plasma |
9. Electricity Arc Heat |
Insulated case |
metal |
Middle |
-3000 |
about 10 |
Dispossible |
Good |
Best |
cann't |
Vacuum deterioration,instability |
10. Ion Beam heat |
Electricity arc Discharge Room |
Metal |
Small
|
2500 |
0.01-0.1 |
Possible |
Bettter |
Better - Best |
can |
super high vacuum |
11. Laser Heat |
surface of sample |
almost all metal |
Small
|
3500 |
about 1,000,000 |
Difficult |
Good |
Better |
can |
heat thin surface (10nm) |
|
